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PL spectral scanning imager / PL mapping / PL spectrometer

Function introduction

1. Pl (photoluminescence) spectrum and white light reflection spectrum of epitaxial wafer are detected.
2. The peak wavelength (WLP), main wavelength (wld), half width (HW), integral intensity (int) and peak intensity (PI) of epilayers were measured by PL spectrum.
3. The thickness and PR of epilayers were measured by white light reflectance spectroscopy.
4. Display and output the mean, mean square deviation (STD), standard deviation (CV) and other statistical results of the measured parameters, and display the mapping distribution of each parameter in the form of graph.
5. Other optional functions:
·Multiple lasers can be selected, up to 4 lasers.
·It can be configured to measure DBR (distributed Bragg reflection) data of each wavelength segment (UV-vis-NIR).
·Configuration of epitaxial warpage measurement function.
·Laser marking machine can be configured.
·Configurable optical power sensor. (corresponding to photo detector)

Equipment model

Im-1130 (mobile cabinet manual PL spectrometer): the im-1130 PL spectrometer adopts the form of mobile cabinet, which is convenient for operation. The standard model can measure 2,4,6 inch pieces, of which 4 pieces can be measured at a time. According to the needs of customers, 9 loading platforms for measuring 2-inch pieces can be configured.
 
Im-2040 (2,4 inch automatic PL spectrometer for inclined silo): im-2000 fully automatic PL spectrometer is an automatic type specially designed for 2,4 inch pieces. This type of equipment uses standard cassette material box as carrier, and can place up to 3 cassettes at a time, with a total of 75 epitaxial wafers.
 
Im-3000 (dual arm manipulator PL spectrometer) im-3000 dual arm manipulator type PL spectrum uses cylindrical coordinate manipulator to automatically take and place film, automatically positive film, using standard cassette material box as the carrier, with a total of 3 stations, and can measure up to 75 epitaxial wafers at a time.